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AIRGARD HPA/TIC Chemical Analyzer
AIRGARD HPA/TIC Chemical Analyzer

AIRGARD HPA/TIC Chemical Analyzer

MKS Instruments, Inc.
AIRGARD® HPA/TIC ambient air analyzer is an ultra-sensitive, FTIR-based gas analyzer designed to rapidly detect toxic gases. This analyzer is capable of detecting parts per billion (ppb) levels of most Hazardous Production Materials (HPMs) and Toxic Industrial Chemicals (TICs) below Threshold Limit Values (TLV) and/or Immediately Dangerous to Life or Health (IDLH) levels within 20 seconds.

Appications Include:
Continuous detection of HPMs and TICs
Airborne Molecular Contamination (AMC)
Emergency Response (ERT) gas monitoring
Ambient air, exhausted enclosures, abatement systems, gas delivery (gas cabinets and VMBs)
Semiconductor, Solar, LED manufacturing
Research laboratories - university, government, nanotech
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